Laser-CVD 3D Rapid Prototyping of Laser Driven Moveable Micro-Objects
نویسندگان
چکیده
Using continuous wave visible (514 nm, 488 nm) laser beams and the gaseous precurcsors lrimethylamine alane (CH3)3NAIH3 and oxygen, free-standing three-dimensional (3D) A1203 ceramic microstructures can be directly written under software control. By suitableIaser irradiation, parts of these 3D microobjectscanbe moved through thermal expansion forces. This is a f i s t step towards laser rapid prototyping of optically driven 3D microobjects such as microtweezers and microrobots. Examples will be presented.
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